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Process Specialties has been providing reliable high quality wafer processing services to the Semiconductor, MEMS, Medical and Military/Aerospace industries since 1988. After 36 years of successfully processing millions of 100 - 200mm wafers, we continue to be a consistent and valuable resource for our client's confidential custom processing needs. Below you will find the normal processing we are offering, In addition we also process SOI, Quartz and SiGe wafers, as well as other substrates/objects. Please call PSI customer service at 1-800-533-8820 to discuss your custom processing needs. |
Processes Specifications Available Size(s) |
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DRY THERMAL OXIDE THERMAL OXIDE POLYSILICON DEPOSITION LPCVD NITRIDE DEPOSITION PVD PURE ALUMINUM PVD ALUMINUM / Cu .5% PVD TITANIUM (Ti) PVD TITANIUM NITRIDE (TiN) PVD TANTALUM (Ta) PVD TANTALUM NITRIDE (TaN) PVD COPPER (Cu) PVD TUNGSTEN (W) PVD CHROME (Cr) WET CLEANING WET PATTERNED ETCHING PLASMA STRIPPING / ETCHING WET STRIPPING PHOTORESIST STRIPPING PROXIMITY PHOTOLITHOGRAPHY PHOTORESIST COATING I-LINE THICK RESIST COATING I-LINE PHOTORESIST COATING DUV PHOTORESIST COATING 193 nm |
40 - 900Å 900 - 25,000Å 1000 - 20,000Å 200 - 3,000Å 1,000 - 20,000Å 1,000 - 20,000Å 200 - 3,000Å 200 - 3,000Å 200 - 3,000Å 200 - 3,000Å 200 - 20,000Å 200 - 3,000Å 200 - 2,000Å RCA, SC1 - SC2, Dilute HF/DI Cleaning HF-BOE Oxide, Metal Etching, etc. POLY / NITRIDE (5um+ Feature Etching) STRIP FILMS/ OXIDE, NITRIDE H2SO4 / H202 (PIRANHA), PLASMA ≥5 CD MICRON PSI / CUSTOMER MASKS I-LINE POSITIVE RESIST 1.5um - 5.5um I-LINE POSITIVE RESIST 5.5um - 10um DUV 248 nm POSITIVE RESIST 1um - 3um DUV 193 nm POSITIVE RESIST .25 - .4um |
50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 75, 100, 125, 150 & 200mm 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 50, 75, 100, 125, 150 & 200mm 75, 100, 125, 150 & 200mm 100, 125, 150 & 200mm 100, 125, 150 & 200mm 100, 125, 150 & 200mm 100, 125, 150 & 200mm 100, 125, 150 & 200mm 100, 125, 150 & 200mm 200mm only 200mm only 200mm only |
If you are interested in any of the above processing services contact customer service at Process Specialties at 800.533.8820 for a quotation. If you do not see exactly the process you are looking for please contact us, as we cannot list all of our services here. If we do not offer your custom process, perhaps we can give you a referral to another qualified supplier. |
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