Process Specialties was the first company back in 1996 to offer 300mm processing services to Machine Tool and IC processing companies world wide. For the past 28 years we have been delivering quick turn times and reliable high quality confidential 300mm processing services to our clients. In 2024 we continue to be a valuable resource for our clients R & D and service processing needs.

In 1997 Process Specialties developed the first production 300mm LPCVD Nitride and Poly Silicon systems. Since then we have processed hundreds of thousands of wafers through our Nitride and Poly Silicon systems. In total since 1996 Process Specialties has successfully processed well over one million 300mm wafers through various operations. Today we offer a myriad of 300mm processing services.

When it comes to 300mm processing remember, that PSI is the most experienced and trusted company currently offering 300mm wafer processing services on the planet!

300mm Processes                                                             Specifications  

DRY THERMAL OXIDE  800-900°C

THERMAL OXIDE (H₂ O₂ Wet Steam) Max 900°C

POLYSILICON DEPOSITION  610°C

LPCVD NITRIDE DEPOSITION  820°C

PVD PURE ALUMINUM

PVD ALUMINUM / Cu .5%

PVD TITANIUM (Ti)

PVD TITANIUM NITRIDE (TiN)

PVD TANTALUM (Ta)

PVD TANTALUM NITRIDE (TaN)

PVD COPPER (Cu)

PVD CHROME (Cr)

PVD TUNGSTEN (W)

WET CLEANING

WET PATTERNED ETCHING

WET STRIPPING

PLASMA STRIPPING / ETCHING

PHOTORESIST STRIPPING

PROXIMITY PHOTOLITHOGRAPHY  (Full Wafer)

BLANKET I-LINE PHOTORESIST COATING

BLANKET 193 nm DUV PHOTORESIST COATING

BLANKET 248nm DUV PHOTORESIST COATING

40 - 900Å

900 - 25,000Å

1000 - 20,000Å

200 - 3,000Å

1,000 - 20,000Å

1,000 - 20,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 20,000Å

200 - 2,000Å

200 - 2000Å

RCA, SC1 - SC2, Dilute HF Cleaning / Dipping...

HF-BOE Oxide etch, Metal Etch, etc.

WET STRIP FILMS, OXIDE, NITRIDE

POLY / NITRIDE  (5um+ Feature Etching)

H₂SO₄ / H₂0₂ (PIRANHA), O₂ PLASMA

4 CD MICRON PSI / CUSTOMER SUPPLIED MASKS

1.4 um - 10.0 um Thickness

.25 um - .4 um Thickness

1.0um - 3.0um Thickness

If you are interested in any of the above processing services contact Customer Service at 800.533.8820 for a quotation. If you do not see exactly the 300mm process you are looking for please contact us, as we cannot list all of our services here and we may offer what you need. If we do not offer your custom processing, we may be able to give you a referral to another qualified supplier.

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